Analysis of SAW Sensor Coated by a Biocompatible Parylen Polymer
Résumé
Piezoelectric sensors are moving rapidly toward commercialization. The issue of robustness and mechanical characterization has become an important consideration in device design and manufacturing. This paper explores experiments and an in-depth analysis of surface acoustic waves (SAW) manufactured on AT-cut quartz substrate with gold transducers and with biocompatible and hydrophobic parylene C (poly(2-chloro-p-xylylene)) coating layer. We discuss different experimental techniques that use electrical and interferometric measurements to analyze the performance of SAW sensors. The present study highlights several approved SAW device characterization techniques and methods, the ways in which they can be optimized, and the ways in which they can be used to enhance SAW device performances.